WEKO3
アイテム
Novel Addressable Test Structure for Detecting Soft Failure of Resistive Elements when Developing Manufacturing Procedures
http://hdl.handle.net/10112/12434
http://hdl.handle.net/10112/124348a323bd7-6eec-47b4-8a57-9c5c28f521b0
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
KU-0300-20180200-00.pdf (1.0 MB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||||||
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| 公開日 | 2018-02-13 | |||||||||
| タイトル | ||||||||||
| タイトル | Novel Addressable Test Structure for Detecting Soft Failure of Resistive Elements when Developing Manufacturing Procedures | |||||||||
| 言語 | en | |||||||||
| 言語 | ||||||||||
| 言語 | eng | |||||||||
| 資源タイプ | ||||||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||||||
| 資源タイプ | journal article | |||||||||
| 著者 |
佐藤, 伸吾
× 佐藤, 伸吾
WEKO
1767
× 大村, 泰久 |
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| 概要 | ||||||||||
| 内容記述タイプ | Other | |||||||||
| 内容記述 | A novel addressable test structure for detecting soft failures of resistive elements is proposed. Its architecture is much simpler than that of previous works, but all functions needed to analyze the electrical properties of detected failures, for example, the aging test with overcurrent, can be realized within the architecture. This makes it more powerful than previous designs. Since the addressable test structure proposed here also has a smaller footprint, it can realize cost effective evaluations. | |||||||||
| 内容記述 | ||||||||||
| 内容記述タイプ | Other | |||||||||
| 内容記述 | This is postprint of a paper accepted for publication in IEEE Trans. Semiconductor Manufacturing. | |||||||||
| 内容記述 | ||||||||||
| 内容記述タイプ | Other | |||||||||
| 内容記述 | This work was financially supported by the Kansai University Fund for Supporting Young Scholars, "The development of the novel test structure for detecting the failures of the resistive element in semiconductor device manufacturing", 2016. | |||||||||
| 書誌情報 |
IEEE Transactions on Semiconductor Manufacturing 巻 31, 号 1, p. 124-129, 発行日 2018-02 |
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| ISSN | ||||||||||
| 収録物識別子タイプ | PISSN | |||||||||
| 収録物識別子 | 08946507 | |||||||||
| DOI | ||||||||||
| 関連タイプ | isVersionOf | |||||||||
| 識別子タイプ | DOI | |||||||||
| 関連識別子 | 10.1109/TSM.2017.2779809 | |||||||||
| 権利 | ||||||||||
| 権利情報 | (C) 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. | |||||||||
| 著者版フラグ | ||||||||||
| 出版タイプ | AM | |||||||||
| 出版タイプResource | http://purl.org/coar/version/c_ab4af688f83e57aa | |||||||||
| 出版者 | ||||||||||
| 出版者 | IEEE | |||||||||
| キーワード | ||||||||||
| 主題Scheme | Other | |||||||||
| 主題 | Addressable test structure | |||||||||
| キーワード | ||||||||||
| 主題Scheme | Other | |||||||||
| 主題 | failure | |||||||||
| キーワード | ||||||||||
| 主題Scheme | Other | |||||||||
| 主題 | soft open and short | |||||||||
| キーワード | ||||||||||
| 主題Scheme | Other | |||||||||
| 主題 | variation | |||||||||
| キーワード | ||||||||||
| 主題Scheme | Other | |||||||||
| 主題 | yield | |||||||||
| キーワード | ||||||||||
| 主題Scheme | Other | |||||||||
| 主題 | Kansai University | |||||||||
| キーワード | ||||||||||
| 主題Scheme | Other | |||||||||
| 主題 | 関西大学 | |||||||||
| キーワード | ||||||||||
| 主題Scheme | Other | |||||||||
| 主題 | 関西大学若手研究者育成経費 | |||||||||
