{"created":"2023-05-15T12:12:47.500723+00:00","id":681,"links":{},"metadata":{"_buckets":{"deposit":"55d3503b-575c-4649-b48a-f801da6251ff"},"_deposit":{"created_by":1,"id":"681","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"681"},"status":"published"},"_oai":{"id":"oai:kansai-u.repo.nii.ac.jp:00000681","sets":["63:69"]},"author_link":["1769","1770","1768","1767"],"item_9_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2018-02","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"1","bibliographicPageEnd":"129","bibliographicPageStart":"124","bibliographicVolumeNumber":"31","bibliographic_titles":[{"bibliographic_title":"IEEE Transactions on Semiconductor Manufacturing"}]}]},"item_9_description_4":{"attribute_name":"概要","attribute_value_mlt":[{"subitem_description":"A novel addressable test structure for detecting soft failures of resistive elements is proposed. Its architecture is much simpler than that of previous works, but all functions needed to analyze the electrical properties of detected failures, for example, the aging test with overcurrent, can be realized within the architecture. This makes it more powerful than previous designs. Since the addressable test structure proposed here also has a smaller footprint, it can realize cost effective evaluations.","subitem_description_type":"Other"}]},"item_9_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"This is postprint of a paper accepted for publication in IEEE Trans. Semiconductor Manufacturing.","subitem_description_type":"Other"},{"subitem_description":"This work was financially supported by the Kansai University Fund for Supporting Young Scholars, \"The development of the novel test structure for detecting the failures of the resistive element in semiconductor device manufacturing\", 2016.","subitem_description_type":"Other"}]},"item_9_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"1769","nameIdentifierScheme":"WEKO"}],"names":[{"name":"佐藤, 伸吾"}]},{"nameIdentifiers":[{"nameIdentifier":"1770","nameIdentifierScheme":"WEKO"}],"names":[{"name":"大村, 泰久"}]}]},"item_9_publisher_34":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"IEEE"}]},"item_9_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type":"isVersionOf","subitem_relation_type_id":{"subitem_relation_type_id_text":"10.1109/TSM.2017.2779809","subitem_relation_type_select":"DOI"}}]},"item_9_rights_13":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"(C) 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works."}]},"item_9_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"08946507","subitem_source_identifier_type":"ISSN"}]},"item_9_version_type_17":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_ab4af688f83e57aa","subitem_version_type":"AM"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Sato, Shingo"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"Omura, Yasuhisa"}],"nameIdentifiers":[{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-05-20"}],"displaytype":"detail","filename":"KU-0300-20180200-00.pdf","filesize":[{"value":"1.0 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KU-0300-20180200-00.pdf","url":"https://kansai-u.repo.nii.ac.jp/record/681/files/KU-0300-20180200-00.pdf"},"version_id":"f2988860-c349-48e3-ac20-d6034564c049"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"Addressable test structure","subitem_subject_scheme":"Other"},{"subitem_subject":"failure","subitem_subject_scheme":"Other"},{"subitem_subject":"soft open and short","subitem_subject_scheme":"Other"},{"subitem_subject":"variation","subitem_subject_scheme":"Other"},{"subitem_subject":"yield","subitem_subject_scheme":"Other"},{"subitem_subject":"Kansai University","subitem_subject_scheme":"Other"},{"subitem_subject":"関西大学","subitem_subject_scheme":"Other"},{"subitem_subject":"関西大学若手研究者育成経費","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Novel Addressable Test Structure for Detecting Soft Failure of Resistive Elements when Developing Manufacturing Procedures","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Novel Addressable Test Structure for Detecting Soft Failure of Resistive Elements when Developing Manufacturing Procedures"}]},"item_type_id":"9","owner":"1","path":["69"],"pubdate":{"attribute_name":"公開日","attribute_value":"2018-02-13"},"publish_date":"2018-02-13","publish_status":"0","recid":"681","relation_version_is_last":true,"title":["Novel Addressable Test Structure for Detecting Soft Failure of Resistive Elements when Developing Manufacturing Procedures"],"weko_creator_id":"1","weko_shared_id":1},"updated":"2023-05-15T14:52:09.369407+00:00"}