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Fabrication of nanocone arrays by two step metal assisted chemical etching method
http://hdl.handle.net/10112/10305
http://hdl.handle.net/10112/103054999781c-d136-414d-b3f9-0df4c79616c2
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
KU-1100-20160127-00.pdf (1.3 MB)
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| Item type | 学術雑誌論文 / Journal Article(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2016-07-15 | |||||
| タイトル | ||||||
| タイトル | Fabrication of nanocone arrays by two step metal assisted chemical etching method | |||||
| 言語 | ||||||
| 言語 | eng | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | journal article | |||||
| 著者 |
Shimizu, Tomohiro
× Shimizu, Tomohiro× Tanaka, Norihiro× Tada, Yoshihiro× Hara, Yasuhiro× Nakamura, Noriaki× Taniuchi, Junichi× Takase, Koichi× Ito, Takeshi× Shingubara, Shoso |
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| 著者別名 | ||||||
| 識別子Scheme | WEKO | |||||
| 識別子 | 1808 | |||||
| 姓名 | 清水, 智弘 | |||||
| 著者別名 | ||||||
| 識別子Scheme | WEKO | |||||
| 識別子 | 1809 | |||||
| 姓名 | 伊藤, 健 | |||||
| 著者別名 | ||||||
| 識別子Scheme | WEKO | |||||
| 識別子 | 1810 | |||||
| 姓名 | 新宮原, 正三 | |||||
| 概要 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | This work develops a novel method for preparing a moth eye structure, which has a sub-wavelength periodical Si nanocone structure on Si (100) substrate, using two-step metal assisted chemical etching (MACE). The 1st and 2nd MACE were respectively performed with the intention to form perpendicular Si nanowire arrays on a Si substrate and sharpening the Si nanowire arrays. We found the inhomogeneous absorption and aggregation of Au particles used as a catalyst for 2nd MACE was important to obtain the nanocone shape. The obtained Si nanocone arrays showed superior anti-reflecting properties especially in wavelength below 600 nm compared to the Si nanowire arrays. A possible mechanism involved in the formation of the nanocone structure by the 2-step MACE is discussed in this paper. | |||||
| 内容記述 | ||||||
| 内容記述タイプ | Other | |||||
| 内容記述 | This work was supported by KAKENHI Grant Numbers 25790024, 25600048 and 15K04602 from the Japan Society for the Promotion of Science (JSPS), Strategic Project to Support the Formation of Research Bases at Private Universities: Matching Fund Subsidy from the Ministry of Education, Culture, Sports, Science and Technology(MEXT), and Kansai University Subsidy for supporting Young Scholars 2013. |
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| 書誌情報 |
Microelectronic Engineering 153(2016) p. 55-59, 発行日 2016-01-27 |
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| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 01679317 | |||||
| DOI | ||||||
| 識別子タイプ | DOI | |||||
| 関連識別子 | 10.1016/j.mee.2016.01.030 | |||||
| 権利 | ||||||
| 権利情報 | This is the author's version of a work that was accepted for publication in Microelectronic Engineering. Publisher's version is available from http://doi.org/10.1016/j.mee.2016.01.030. | |||||
| 権利 | ||||||
| 権利情報 | Ⓒ2016 Elsevier | |||||
| 出版者 | ||||||
| 出版者 | Elsevier | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | 関西大学 (Kansai University) | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | ナノワイヤ (nanowire) | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | ナノコーン (nanocone) | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | メタルアシストエッチング (metal assisted chemical etcing) | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | 反射防止膜 (anti-reflection layer) | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | ナノ粒子 (nanoparticle) | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | 平成25～26年度関西大学若手研究者育成経費 | |||||
