{"created":"2023-05-15T12:12:47.631836+00:00","id":684,"links":{},"metadata":{"_buckets":{"deposit":"01bc83ad-240d-4d49-a615-67b24a541cc9"},"_deposit":{"created_by":1,"id":"684","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"684"},"status":"published"},"_oai":{"id":"oai:kansai-u.repo.nii.ac.jp:00000684","sets":["63:69"]},"author_link":["1801","1805","1799","1810","1802","1806","1803","1807","1808","1809","1804","1800"],"item_9_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2016-01-27","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"59","bibliographicPageStart":"55","bibliographic_titles":[{"bibliographic_title":"Microelectronic Engineering 153(2016)"}]}]},"item_9_description_4":{"attribute_name":"概要","attribute_value_mlt":[{"subitem_description":"This work develops a novel method for preparing a moth eye structure, which has a sub-wavelength periodical Si nanocone structure on Si (100) substrate, using two-step metal assisted chemical etching (MACE). The 1st and 2nd MACE were respectively performed with the intention to form perpendicular Si nanowire arrays on a Si substrate and sharpening the Si nanowire arrays. We found the inhomogeneous absorption and aggregation of Au particles used as a catalyst for 2nd MACE was important to obtain the nanocone shape. The obtained Si nanocone arrays showed superior anti-reflecting properties especially in wavelength below 600 nm compared to the Si nanowire arrays. A possible mechanism involved in the formation of the nanocone structure by the 2-step MACE is discussed in this paper.","subitem_description_type":"Other"}]},"item_9_description_5":{"attribute_name":"内容記述","attribute_value_mlt":[{"subitem_description":"This work was supported by KAKENHI Grant Numbers 25790024, 25600048 and\n15K04602 from the Japan Society for the Promotion of Science (JSPS), Strategic Project to Support the Formation of Research Bases at Private Universities: Matching Fund Subsidy from the Ministry of Education, Culture, Sports, Science and Technology(MEXT), and Kansai University Subsidy for supporting Young Scholars 2013.","subitem_description_type":"Other"}]},"item_9_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"1808","nameIdentifierScheme":"WEKO"}],"names":[{"name":"清水, 智弘"}]},{"nameIdentifiers":[{"nameIdentifier":"1809","nameIdentifierScheme":"WEKO"}],"names":[{"name":"伊藤, 健"}]},{"nameIdentifiers":[{"nameIdentifier":"1810","nameIdentifierScheme":"WEKO"}],"names":[{"name":"新宮原, 正三"}]}]},"item_9_publisher_34":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"Elsevier"}]},"item_9_relation_12":{"attribute_name":"DOI","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"10.1016/j.mee.2016.01.030","subitem_relation_type_select":"DOI"}}]},"item_9_rights_13":{"attribute_name":"権利","attribute_value_mlt":[{"subitem_rights":"This is the author's version of a work that was accepted for publication in Microelectronic Engineering. Publisher's version is available from http://doi.org/10.1016/j.mee.2016.01.030."},{"subitem_rights":"Ⓒ2016 Elsevier"}]},"item_9_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"01679317","subitem_source_identifier_type":"ISSN"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"Shimizu, Tomohiro"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"Tanaka, Norihiro"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Tada, Yoshihiro"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Hara, Yasuhiro"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Nakamura, Noriaki"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Taniuchi, Junichi"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Takase, Koichi"}],"nameIdentifiers":[{}]},{"creatorNames":[{"creatorName":"Ito, Takeshi"}],"nameIdentifiers":[{},{}]},{"creatorNames":[{"creatorName":"Shingubara, Shoso"}],"nameIdentifiers":[{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-05-20"}],"displaytype":"detail","filename":"KU-1100-20160127-00.pdf","filesize":[{"value":"1.3 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KU-1100-20160127-00.pdf","url":"https://kansai-u.repo.nii.ac.jp/record/684/files/KU-1100-20160127-00.pdf"},"version_id":"71f52a20-11c0-448d-97e1-b27de2cd3a53"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"関西大学 (Kansai University)","subitem_subject_scheme":"Other"},{"subitem_subject":"ナノワイヤ (nanowire)","subitem_subject_scheme":"Other"},{"subitem_subject":"ナノコーン (nanocone)","subitem_subject_scheme":"Other"},{"subitem_subject":"メタルアシストエッチング (metal assisted chemical etcing)","subitem_subject_scheme":"Other"},{"subitem_subject":"反射防止膜 (anti-reflection layer)","subitem_subject_scheme":"Other"},{"subitem_subject":"ナノ粒子 (nanoparticle)","subitem_subject_scheme":"Other"},{"subitem_subject":"平成25～26年度関西大学若手研究者育成経費","subitem_subject_scheme":"Other"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"eng"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"journal article","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"Fabrication of nanocone arrays by two step metal assisted chemical etching method","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"Fabrication of nanocone arrays by two step metal assisted chemical etching method"}]},"item_type_id":"9","owner":"1","path":["69"],"pubdate":{"attribute_name":"公開日","attribute_value":"2016-07-15"},"publish_date":"2016-07-15","publish_status":"0","recid":"684","relation_version_is_last":true,"title":["Fabrication of nanocone arrays by two step metal assisted chemical etching method"],"weko_creator_id":"1","weko_shared_id":1},"updated":"2023-05-15T16:12:30.301738+00:00"}