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  1. 1100 学部・機構・専門職大学院
  2. 理工系学部
  3. 化学生命工学部
  4. 雑誌発表論文等

Highly crystalline yttria‐stabilized zirconia and titania thin films on plastic substrates via sol‐gel transfer process

http://hdl.handle.net/10112/0002003528
http://hdl.handle.net/10112/0002003528
5ee67c03-2843-4176-b1ce-9b880fbddb33
名前 / ファイル ライセンス アクション
KU-1100-20240505-01.pdf KU-1100-20240505-01.pdf (1.4 MB)
Item type 学術雑誌論文 / Journal Article(1)
公開日 2025-11-27
タイトル
タイトル Highly crystalline yttria‐stabilized zirconia and titania thin films on plastic substrates via sol‐gel transfer process
言語 en
言語
言語 eng
資源タイプ
資源タイプ識別子 http://purl.org/coar/resource_type/c_6501
資源タイプ journal article
アクセス権
アクセス権 open access
アクセス権URI http://purl.org/coar/access_right/c_abf2
著者 幸塚, 広光

× 幸塚, 広光

WEKO 27619
e-Rad_Researcher 80178219
ORCID iD 0000-0002-3385-215X

en Kozuka, Hiromitsu

ja 幸塚, 広光

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山田, 健人

× 山田, 健人

en Yamada, Takehito

ja 山田, 健人

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奥田, 崚太

× 奥田, 崚太

en Okuda, Ryota

ja 奥田, 崚太

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平社, 英之

× 平社, 英之

en Hirakoso, Hideyuki

ja 平社, 英之

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概要
内容記述タイプ Other
内容記述 We prepared yttria-stabilized zirconia (YSZ) and titania crystalline thin films on polycarbonate (PC) substrates by the sol-gel transfer technique that we have developed recently. Precursor gel films were deposited by spin-coating on a polyimide/polyvinylpyrrolidone mixture layer on Si(100) substrates, and then were calcined at 600◦C. The spin-coating and the calcination were cycled, followed by final firing at 600 - 1000◦C, to obtain 140 - 190 nm thick, YSZ and titania crystalline thin films. The film densification progressed as the final firing temperature increased, where the porosity calculated from the refractive index decreased down to a few percent. The film thus obtained was heated at 190◦C on a hot plate, and a PC substrate was pressed on the film to transfer it to the PC substrate. The transferability quantified by image analysis of the film area was found to be significantly different between the YSZ and titania films. In the case of YSZ films, the area of silicon that was fractured and adhered to the transferred film increased significantly with increasing firing temperature, leading to a decrease down to 0% in the fraction of the successful transfer area without such a damage. On the other hand, the fraction of the successful transfer area remained around 90% irrespective of the firing temperature for the titania films. The surface of the titania films that were fired at 800 - 1000◦C and transferred to PC substrates had voids of several tens nm scale, which may have been formed during anatase-to-rutile phase transformation. We thought that the reduced titania/Si(100) contact area due to such void formation facilitated the delamination of the titania films from Si(100) substrates. High temperature firing, which promotes crystallization and densification of films, thus affects differently the film transferability to plastic substrates, depending on the type of films. The work also suggested possible use of titania films as release-assisting layers.
言語 en
書誌情報 en : Journal of the American Ceramic Society

巻 107, 号 9, p. 5749-5761, 発行日 2024-05-05
ISSN
収録物識別子タイプ PISSN
収録物識別子 0002-7820
ISSN
収録物識別子タイプ EISSN
収録物識別子 1551-2916
書誌レコードID
収録物識別子タイプ NCID
収録物識別子 AA00692599
DOI
関連タイプ isVersionOf
識別子タイプ DOI
関連識別子 https://doi.org/10.1111/jace.19857
権利
言語 en
権利情報 This is the peer reviewed version of the following article: Kozuka H, Yamada T, Okuda R, Hirakoso H. Highly crystalline yttria-stabilized zirconia and titania thin films on plastic substrates via sol-gel transfer process. J Am Ceram Soc. 2024; 107: 5749–5761. https://doi.org/10.1111/jace.19857 , which has been published in final form at https://doi.org/10.1111/jace.19857. This article may be used for non-commercial purposes in accordance with Wiley Terms and Conditions for Use of Self-Archived Versions. This article may not be enhanced, enriched or otherwise transformed into a derivative work, without express permission from Wiley or by statutory rights under applicable legislation. Copyright notices must not be removed, obscured or modified. The article must be linked to Wiley’s version of record on Wiley Online Library and any embedding, framing or otherwise making available the article or pages thereof by third parties from platforms, services and websites other than Wiley Online Library must be prohibited.
著者版フラグ
出版タイプ AM
出版タイプResource http://purl.org/coar/version/c_ab4af688f83e57aa
出版者
出版者 Wiely
言語 en
キーワード
言語 en
主題Scheme Other
主題 polycarbonate
キーワード
言語 en
主題Scheme Other
主題 porosity
キーワード
言語 en
主題Scheme Other
主題 sol-gel
キーワード
言語 en
主題Scheme Other
主題 thin film
キーワード
言語 en
主題Scheme Other
主題 titania
キーワード
言語 en
主題Scheme Other
主題 yttria-stabilized zirconia
キーワード
言語 ja
主題Scheme Other
主題 関西大学
キーワード
言語 en
主題Scheme Other
主題 Kansai University
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