{"created":"2023-05-15T12:20:57.010774+00:00","id":11688,"links":{},"metadata":{"_buckets":{"deposit":"7e42d3ba-cb0a-4c7a-9ced-3e6df44c01fa"},"_deposit":{"created_by":1,"id":"11688","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"11688"},"status":"published"},"_oai":{"id":"oai:kansai-u.repo.nii.ac.jp:00011688","sets":["528:1588:1604:1610"]},"author_link":["27864","27863"],"item_10_alternative_title_20":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Evolution of photo-lithography system for development of highly information society"}]},"item_10_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2012-11-16","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"80","bibliographicPageStart":"75","bibliographicVolumeNumber":"19","bibliographic_titles":[{"bibliographic_title":"理工学と技術 : 関西大学理工学会誌 = Engineering & technology"}]}]},"item_10_description_4":{"attribute_name":"概要","attribute_value_mlt":[{"subitem_description":"半導体集積回路（IC）は、最近20年の間に驚異的な進化を遂げ、高度情報化社会を牽引してきた。IT産業という言葉を定着させ、その発展を支えたのはICの進化のおかげであると断言しても過言ではない。ICを進化させたのは、フォトリソグラフィの発展により、レジストパターン幅を縮小させることに成功してきたからである。そのレジストパターンの発展も、いよいよ限界に近づき、分子レベルでのコントロールに迫ろうとしている。","subitem_description_type":"Other"}]},"item_10_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"27864","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Kudo, Hiroto"}]}]},"item_10_publisher_34":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"関西大学理工学会"}]},"item_10_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA12311681","subitem_source_identifier_type":"NCID"}]},"item_10_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"18830021","subitem_source_identifier_type":"ISSN"}]},"item_10_version_type_17":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"工藤, 宏人"}],"nameIdentifiers":[{},{}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-05-23"}],"displaytype":"detail","filename":"KU-1100-20121116-14.pdf","filesize":[{"value":"932.0 kB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KU-1100-20121116-14.pdf","url":"https://kansai-u.repo.nii.ac.jp/record/11688/files/KU-1100-20121116-14.pdf"},"version_id":"920d8373-2d3d-448a-bb65-87ea3445c1fb"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"トピックス　高度情報化社会の発展を支え続けるフォトリソグラフィの進化","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"トピックス　高度情報化社会の発展を支え続けるフォトリソグラフィの進化"}]},"item_type_id":"10","owner":"1","path":["1610"],"pubdate":{"attribute_name":"公開日","attribute_value":"2013-02-01"},"publish_date":"2013-02-01","publish_status":"0","recid":"11688","relation_version_is_last":true,"title":["トピックス　高度情報化社会の発展を支え続けるフォトリソグラフィの進化"],"weko_creator_id":"1","weko_shared_id":1},"updated":"2023-05-15T15:38:49.656848+00:00"}