{"created":"2023-05-15T12:20:56.836156+00:00","id":11684,"links":{},"metadata":{"_buckets":{"deposit":"0838399f-306e-4b8a-8c12-c6acc51b03f0"},"_deposit":{"created_by":1,"id":"11684","owners":[1],"pid":{"revision_id":0,"type":"depid","value":"11684"},"status":"published"},"_oai":{"id":"oai:kansai-u.repo.nii.ac.jp:00011684","sets":["528:1588:1604:1610"]},"author_link":["27855","27856"],"item_10_alternative_title_20":{"attribute_name":"その他のタイトル","attribute_value_mlt":[{"subitem_alternative_title":"Fabrication of vertically oriented silicon nanowire arrays on silicon substrate using metal assisted etching method"}]},"item_10_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2012-11-16","bibliographicIssueDateType":"Issued"},"bibliographicPageEnd":"58","bibliographicPageStart":"55","bibliographicVolumeNumber":"19","bibliographic_titles":[{"bibliographic_title":"理工学と技術 : 関西大学理工学会誌 = Engineering & technology"}]}]},"item_10_description_4":{"attribute_name":"概要","attribute_value_mlt":[{"subitem_description":"半導体ナノワイヤは高効率太陽電池や高感度バイオセンサなど様々な用途が期待されている材料である。特にシリコンナノワイヤはCMOSテクノロジーとの高い親和性から注目を集めている。本稿ではこの金属触媒と溶液を用いたシリコンナノワイヤの自己組織的な形成方法とその形状制御の試みについて説明する。","subitem_description_type":"Other"}]},"item_10_full_name_3":{"attribute_name":"著者別名","attribute_value_mlt":[{"nameIdentifiers":[{"nameIdentifier":"27856","nameIdentifierScheme":"WEKO"}],"names":[{"name":"Shimizu, Tomohiro"}]}]},"item_10_publisher_34":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"関西大学理工学会"}]},"item_10_source_id_10":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_source_identifier":"AA12311681","subitem_source_identifier_type":"NCID"}]},"item_10_source_id_8":{"attribute_name":"ISSN","attribute_value_mlt":[{"subitem_source_identifier":"18830021","subitem_source_identifier_type":"ISSN"}]},"item_10_version_type_17":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorAffiliations":[{"affiliationNameIdentifiers":[{"affiliationNameIdentifier":"","affiliationNameIdentifierScheme":"ISNI","affiliationNameIdentifierURI":"http://www.isni.org/isni/"}],"affiliationNames":[{"affiliationName":"","affiliationNameLang":"ja"}]}],"creatorNames":[{"creatorName":"清水, 智弘","creatorNameLang":"ja"},{"creatorName":"Shimizu, Tomohiro","creatorNameLang":"en"}],"familyNames":[{"familyName":"清水","familyNameLang":"ja"},{"familyName":"Shimizu","familyNameLang":"en"}],"givenNames":[{"givenName":"智弘","givenNameLang":"ja"},{"givenName":"Tomohiro","givenNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"27855","nameIdentifierScheme":"WEKO"},{"nameIdentifier":"80581165","nameIdentifierScheme":"e-Rad","nameIdentifierURI":"https://nrid.nii.ac.jp/ja/nrid/1000080581165"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2019-05-23"}],"displaytype":"detail","filename":"KU-1100-20121116-10.pdf","filesize":[{"value":"1.2 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"KU-1100-20121116-10.pdf","url":"https://kansai-u.repo.nii.ac.jp/record/11684/files/KU-1100-20121116-10.pdf"},"version_id":"f8de1e64-70de-4f7f-9d2b-b68b06c16d23"}]},"item_language":{"attribute_name":"言語","attribute_value_mlt":[{"subitem_language":"jpn"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"トピックス メタルアシストエッチングを用いた垂直配列シリコンナノワイヤ配列の形成","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"トピックス メタルアシストエッチングを用いた垂直配列シリコンナノワイヤ配列の形成"}]},"item_type_id":"10","owner":"1","path":["1610"],"pubdate":{"attribute_name":"公開日","attribute_value":"2013-02-01"},"publish_date":"2013-02-01","publish_status":"0","recid":"11684","relation_version_is_last":true,"title":["トピックス メタルアシストエッチングを用いた垂直配列シリコンナノワイヤ配列の形成"],"weko_creator_id":"1","weko_shared_id":1},"updated":"2024-04-23T04:33:30.010663+00:00"}