@article{weko_11547_1,
   author	 = "Yamamoto,Hiroki and Kudo,Hiroto and Kozawa,Takahiro",
   title	 = "Study on resist performance of chemically amplified molecular resists based on cyclic oligomers",
   journal	 = "Microelectronic Engineering",
   year 	 = "2014",
   volume	 = "133",
   number	 = "",
   pages	 = "16--22",
   month	 = "feb"
}